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Product Performance
Maximum temperature: 1200℃
Effective working area: 600×600×1000mm
Limit cold vacuum: 6.67×10-4Pa
Boosting rate: ≤ 0.67Pa/h
This equipment contains the furnace body part of the furnace shell, door, electrode and other components, excluding the vacuum system, electrical system, heating system, so from the design and manufacture of the furnace body to fully meet the following parameters, the empty furnace to restore the vacuum time, vacuum and other final data from the equipment and the vacuum system and other related ancillary equipment to decide together.
Maximum heating temperature | 1200℃ |
Working temperature | 1400℃ |
Effective size of homogeneous temperature zone | ≥ the effective size of the existing equipment |
Maximum load capacity of single furnace | 550Kg (including workpiece tray, material rack tray) |
Temperature uniformity | ±5℃ |
Empty furnace recovery vacuum time | ＜10min (atmosphere to 2×10-2Pa Unloaded) |
Limit vacuum | ≤2×10-4Pa (no load, dry, clean) |
Working vacuum | ≤5×10-3Pa |
Pressure rise rate | ≤0.3Pa/h |
Heating method | Tantalum chip resistance heating (provided by Party A) |
Temperature detection | Duplex armoured WRe5/26 thermocouple (provided by Party A) |
Impurity requirements | After annealing tantalum wire impurity indicators in line with the process requirements |
The overall welding process of the furnace body has been greatly improved compared with the original equipment, using the latest welding technology, and X-ray flaw detection technology, the overall quality of the furnace body is more guaranteed.
The hinge structure of the furnace door is upgraded, and the hinge structure can be adjusted up and down, compared with the original fixed structure, it is more flexible and easier to operate and maintain.
The connection structure of the heat field is more solid, the original wire fixing structure is unstable and easy to deform, now the structure is changed to bolt + ceramic base fixing, the structure is more reliable and more beautiful.
